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Microelectromechanical systems
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461	2014 Ieee DanIeL e. noBLe aWaRD foR eMeRgIng TeChnoLogIeS Sponsored by the Motorola Foundation GABRIEL M. REBEIZ Add to Reading List Source URL: mtt.org Language: English - Date: 2014-07-18 03:13:29 Technology Electromagnetism Microelectromechanical systems Radio frequency Institute of Electrical and Electronics Engineers Microtechnology RF MEMS Engineering
462	Electronics, Software and Devices Technologies C a t a l o g S u i t l e Available for Licensing Electronics S Add to Reading List Source URL: www.ndsuresearchfoundation.org Language: English - Date: 2014-10-20 17:21:56 Thin films Emerging technologies Nanomaterials Ultraviolet radiation Superhard materials Microelectromechanical systems Nanoparticle Graphene Solar cell Chemistry Materials science Matter
463	Mechanics of Materials, Resource and Energy Efficient Solutions Add to Reading List Source URL: www.en.iwm.fraunhofer.de Language: English - Date: 2013-07-26 08:20:27 Mechanical engineering Fraunhofer Society Laboratories Systems engineering Tribology Reliability Multiscale modeling Microelectromechanical systems Fraunhofer Additive Manufacturing Alliance Materials science Science Physics
464	SEMI-FINISHED BONDED SUBSTRATES: SILICON ON GLASS (SOG) µm up. The precise specifications of each Contact Add to Reading List Source URL: www.enas.fraunhofer.de Language: English - Date: 2015-01-15 06:53:22 Electronics manufacturing Wafer bonding Semiconductor device fabrication Wafer Chemical bonding Anodic bonding Direct bonding 100 micrometres Microelectromechanical systems Microtechnology Electronics Technology
465	1 1 Evaluation of Mechanical Properties of MEMS Materials and Their Standardization Toshiyuki Tsuchiya, Department of Micro Engineering, Kyoto University, Japan Add to Reading List Source URL: www.wiley-vch.de Language: English - Date: 2007-11-21 05:43:30 Nanotechnology Mechanical engineering Microtechnology Microelectromechanical systems Strength of materials Ultimate tensile strength Cantilever Fatigue Tensile testing Materials science Physics Elasticity
466	SEMI-FINISHED BONDED SUBSTRATES Silicon LiTaO3 100 µm Add to Reading List Source URL: www.enas.fraunhofer.de Language: English - Date: 2015-01-15 05:44:20 Electronics manufacturing Wafer bonding Microelectromechanical systems Anodic bonding Eutectic bonding Wafer Adhesive bonding Glass frit bonding Direct bonding Microtechnology Technology Electronics
467	Microsoft PowerPoint - Materials Role STOA Brussels KBock [Kompatibilitätsmodus] Add to Reading List Source URL: www.europarl.europa.eu Language: English - Date: 2012-07-12 03:44:15 Microtechnology Electromagnetism Electrical engineering Mechanical engineering Microelectromechanical systems Sensor Norwegian Institute of Technology Nanoparticle Fraunhofer Group for Microelectronics Transducers Technology Materials science
468	Capabilities Service Details Specific application Add to Reading List Source URL: www.ipms.fraunhofer.de Language: English - Date: 2015-01-15 19:37:11 Semiconductor device fabrication Nanotechnology Etching Microelectromechanical systems Transducers Surface micromachining Bulk micromachining Deep reactive-ion etching Chemical-mechanical planarization Materials science Microtechnology Technology
469	F R A U N H O F E R I n s t i t u t e F o R E l e c t roni c N A no s y s t e m s E N A S System Packaging Add to Reading List Source URL: www.enas.fraunhofer.de Language: English - Date: 2015-01-15 04:48:28 Electronics manufacturing Semiconductor device fabrication Wafer bonding Chemical bonding Microelectromechanical systems Reactive bonding Glass frit bonding Three-dimensional integrated circuit Micro-Opto-Electro-Mechanical Systems Microtechnology Technology Electronics
470	FRAUNHOFER CAM IS A COMPETENCE CENTER FOR MICROSTRUCTURE DIAGNOSTICS A N D M AT E R I A L C H A R A C T E R I Z AT I O N WITHIN FRAUNHOFER IWM IN HALLE FRAUNHOFER CENTER Add to Reading List Source URL: www.iwm.fraunhofer.de Language: English - Date: 2014-05-20 04:27:47 Dielectrics Ceramic materials Glass Ceramic Microelectromechanical systems Materials science Electromagnetism Chemistry

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